Elmeri Österlund

Mechanical properties and reliability of aluminum nitride thin films

Elmeri Österlund, Jere Kinnunen, Ville Rontu et al. · Journal of Alloys and Compounds · 2018 · 57 citations · Full text

Materials Science, Aluminium Nitride, Engineering +4

Microstructural Characterization and Mechanical Performance of Wafer-Level SLID Bonded Au-Sn and Cu-Sn Seal Rings for MEMS Encapsulation

Antti Rautiainen, Hongbo Xü, Elmeri Österlund et al. · Journal of Electronic Materials · 2015 · 39 citations

Materials Science, Engineering, Advanced Packaging (Semiconductors) +13

Stability and residual stresses of sputtered wurtzite AlScN thin films

Elmeri Österlund, Glenn Ross, A. Miguel et al. · Physical Review Materials · 2021 · 38 citations · Full text

Aluminium Nitride, Engineering, Piezoelectric Properties +16

Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls

Elmeri Österlund, Heli Seppänen, Kristina Bespalova et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 26 citations · Full text

Aluminium Nitride, Mems Sensors, Engineering +16

Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Kristina Bespalova, Elmeri Österlund, Glenn Ross et al. · Journal of Microelectromechanical Systems · 2021 · 17 citations · Full text

Aluminium Nitride, Biomedical Acoustics, Engineering +23