Concepedia

Kristina Bespalova

KB

2

Publications

43

Citations

2

H-Index

2021

Active since

Affiliations

Aalto University(Current)

Kristina Bespalova is an author at Aalto University specializing in materials science, surface science, and microstructure.

Top concepts

EngineeringMicrostructureApplied PhysicsSurface ScienceMaterial ScienceMaterials EngineeringThin FilmsUltrasoundMicrofluidicsMicrofabrication

Publications per year

2021–2021

2

Publications

2

Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls

Elmeri Österlund, Heli Seppänen, Kristina Bespalova et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 26 citations · Full text

Aluminium Nitride, Mems Sensors, Engineering +16

Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Kristina Bespalova, Elmeri Österlund, Glenn Ross et al. · Journal of Microelectromechanical Systems · 2021 · 17 citations · Full text

Aluminium Nitride, Biomedical Acoustics, Engineering +23

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