Concepedia

Ari Häärä

AH

Statistics

Publications

3

Citations

110

H-Index

3

Active since

2002

Affiliations

VTT Technical Research Centre of Finland(Current)

Ari Häärä is an author at VTT Technical Research Centre of Finland specializing in applied physics, engineering, and microfabrication.

Top concepts

Publications per year

2002–2012

3

Publications

3

Electrostatic transportation of water droplets on superhydrophobic surfaces

Altti Torkkeli, Jaakko Saarilahti, Ari Häärä et al. · 2002 · 51 citations

, , +13

Long-term stability of single-crystal silicon microresonators

Mika Koskenvuori, T. Mattila, Ari Häärä et al. · Sensors and Actuators A Physical · 2004 · 44 citations

, , +5

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

Riikka L. Puurunen, Ari Häärä, Heini Saloniemi et al. · Sensors and Actuators A Physical · 2012 · 15 citations

, , +10

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