Concepedia

Publication | Closed Access

Long-term stability of single-crystal silicon microresonators

DOI

44

Citations

5

References

2004

Year

Mika Koskenvuori, T. Mattila, Ari Häärä, Jyrki Kiihamäki, Ilkka Tittonen, A. Oja, Heikki Seppä
Sensors and Actuators A Physical

References

YearCitations

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