Jyrki Kiihamäki

Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low-Phase-Noise Oscillator Applications

V. Kaajakari, T. Mattila, A. Oja et al. · IEEE Electron Device Letters · 2004 · 186 citations

Engineering, Electrical Engineering, Physics +17

A 12 MHz micromechanical bulk acoustic mode oscillator

T. Mattila, Jyrki Kiihamäki, T. Lamminmäki et al. · Sensors and Actuators A Physical · 2002 · 147 citations

Engineering, Electrical Engineering, Physics +8

Pattern shape effects and artefacts in deep silicon etching

Jyrki Kiihamäki, Sami Franssila · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 82 citations

Engineering, Physics, Microelectronics +12

<title>Loading effects in deep silicon etching</title>

Jani Karttunen, Jyrki Kiihamäki, Sami Franssila · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 79 citations

Engineering, Electrical Engineering, Materials Science +16

Stability of wafer level vacuum encapsulated single-crystal silicon resonators

V. Kaajakari, Jyrki Kiihamäki, A. Oja et al. · Sensors and Actuators A Physical · 2005 · 75 citations

Engineering, Materials Engineering, Materials Science +14