Jyrki Kiihamäki

Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low-Phase-Noise Oscillator Applications

V. Kaajakari, T. Mattila, A. Oja et al. · IEEE Electron Device Letters · 2004 · 186 citations

Electrical Engineering, Engineering, Micromachines +14

A 12 MHz micromechanical bulk acoustic mode oscillator

T. Mattila, Jyrki Kiihamäki, T. Lamminmäki et al. · Sensors and Actuators A Physical · 2002 · 146 citations

Engineering, Mechanical Engineering, Mechanical Systems +5

Pattern shape effects and artefacts in deep silicon etching

Jyrki Kiihamäki, Sami Franssila · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 82 citations

Aspect Ratio Dependence, Electrical Engineering, Engineering +15

<title>Loading effects in deep silicon etching</title>

Jani Karttunen, Jyrki Kiihamäki, Sami Franssila · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 77 citations

Materials Engineering, Electrical Engineering, Scale Pattern Dependencies +15

Square-extensional mode single-crystal silicon micromechanical RF-resonator

V. Kaajakari, T. Mattila, A. Oja et al. · 2004 · 74 citations

Electrical Engineering, Vibrations, Engineering +14