Jani Karttunen

<title>Loading effects in deep silicon etching</title>

Jani Karttunen, Jyrki Kiihamäki, Sami Franssila · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 77 citations

Materials Engineering, Electrical Engineering, Scale Pattern Dependencies +15

14 MHz micromechanical oscillator

T. Mattila, Olli Jaakkola, Jyrki Kiihamäki et al. · Sensors and Actuators A Physical · 2002 · 49 citations

Engineering, Oscillators, High-frequency Device +6

Depth and profile control in plasma etched MEMS structures

Jyrki Kiihamäki, H. Kattelus, Jani Karttunen et al. · Sensors and Actuators A Physical · 2000 · 33 citations

Electrical Engineering, Engineering, Microfabrication +7

Etching through silicon wafer in inductively coupled plasma

Sami Franssila, J. Kiiham�ki, Jani Karttunen · Microsystem Technologies · 2000 · 24 citations

Electrical Engineering, Engineering, Microfabrication +6