Concepedia

Publication | Closed Access

A 12 MHz micromechanical bulk acoustic mode oscillator

DOI

146

Citations

17

References

2002

Year

T. Mattila, Jyrki Kiihamäki, T. Lamminmäki, Olli Jaakkola, Pekka Rantakari, A. Oja, Heikki Seppä, H. Kattelus, Ilkka Tittonen
Sensors and Actuators A Physical

References

YearCitations

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