Pekka Rantakari

A 12 MHz micromechanical bulk acoustic mode oscillator

T. Mattila, Jyrki Kiihamäki, T. Lamminmäki et al. · Sensors and Actuators A Physical · 2002 · 146 citations

Engineering, Mechanical Engineering, Mechanical Systems +5

Square-extensional mode single-crystal silicon micromechanical RF-resonator

V. Kaajakari, T. Mattila, A. Oja et al. · 2004 · 74 citations

Electrical Engineering, Vibrations, Engineering +14

100 GHz zinc oxide Schottky diodes processed from solution on a wafer scale

Dimitra G. Georgiadou, J. Edward Semple, Abhay A. Sagade et al. · Nature Electronics · 2020 · 74 citations · Full text

Electrical Engineering, Wafer Scale Processing, Engineering +9

The development and evaluation of RF TSV for 3D IPD applications

Thorbjörn Ebefors, Jessica Fredlund, Daniel Perttu et al. · 2013 · 55 citations

Engineering, Silicon Vias, Partners Tno +21

Wafer-Level Transfer Technologies for PZT-Based RF MEMS Switches

R. Guerre, Ute Drechsler, D. P. Bhattacharyya et al. · Journal of Microelectromechanical Systems · 2010 · 52 citations

Pzt Stack, Electrical Engineering, Wafer Scale Processing +12