Concepedia

Thorbjörn Ebefors

TE

8

Publications

282

Citations

8

H-Index

1998

Active since

Affiliations

KTH Royal Institute of Technology(Current)

Silex Microsystems (Sweden)

Chalmers University of Technology

Mycronic (Sweden)

Thorbjörn Ebefors is an author at KTH Royal Institute of Technology specializing in engineering, electrical engineering, and microfabrication.

Top concepts

EngineeringMicroelectronicsMicrofabricationElectrical Engineering3D PrintingApplied PhysicsMaterial ScienceAdvanced PackagingElectronic PackagingMechanical Engineering

Publications per year

1998–2018

8

Publications

8

The development and evaluation of RF TSV for 3D IPD applications

Thorbjörn Ebefors, Jessica Fredlund, Daniel Perttu et al. · 2013 · 55 citations

Engineering, Silicon Vias, Partners Tno +21

New small radius joints based on thermal shrinkage of polyimide in V-grooves for robust self-assembly 3D microstructures

Thorbjörn Ebefors, Edvard Kälvesten, Göran Stemme · Journal of Micromechanics and Microengineering · 1998 · 49 citations

Materials Science, Simple Technology, Engineering +15

Low-Loss, High-Linearity RF Interposers Enabled by Through Glass Vias

Umer Shah, Jessica Liljeholm, James Campion et al. · IEEE Microwave and Wireless Components Letters · 2018 · 45 citations · Full text

Advanced Packaging, 3D Ic Architecture, Electrical Engineering +14

Dynamic actuation of polyimide V-groove joints by electrical heating

Thorbjörn Ebefors, Edvard Kälvesten, Göran Stemme · Sensors and Actuators A Physical · 1998 · 38 citations

Engineering, Dynamic Actuation, Mechanics +7

Through-Glass Vias for Glass Interposers and MEMS Packaging Applications Fabricated Using Magnetic Assembly of Microscale Metal Wires

Miku J. Laakso, Simon J. Bleiker, Jessica Liljeholm et al. · IEEE Access · 2018 · 37 citations · Full text

Engineering, Interconnect (Integrated Circuits), Micro-electromechanical System +20

Rows per page

1–5 of 8