Dynamic actuation of polyimide V-groove joints by electrical heating

Controlled Folding of Micrometer-Size Structures

Elisabeth Smela, Olle Inganäs, Ingemar Lundström · Science · 1995 · 580 citations

Engineering, Mechanical Engineering, Origami Metamaterials +19

Microfabricated hinges

Kristofer S. J. Pister, Michael W. Judy, Steve R. Burgett et al. · Sensors and Actuators A Physical · 1992 · 279 citations

Demonstration of three-dimensional microstructure self-assembly

P.W. Green, R.R.A. Syms, Eric M. Yeatman · Journal of Microelectromechanical Systems · 1995 · 99 citations

Engineering, Molecular Self-assembly, Mechanical Engineering +16

Self-assembled microactuated XYZ stages for optical scanning and alignment

Fan Li, Ming C. Wu, Kent D. Choquette et al. · 2002 · 98 citations

Engineering, Microscopy, Mechanical Engineering +19

An integrated pressure—flow sensor for correlation measurements in turbulent gas flows

Edvard Kälvesten, C. Vieider, Lennart Löfdahl et al. · Sensors and Actuators A Physical · 1996 · 62 citations

Engineering, Sensors, Measurement +9