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Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

DOI

15

Citations

10

References

2012

Year

Riikka L. Puurunen, Ari Häärä, Heini Saloniemi, James Dekker, Markku Kainlauri, Helena Pohjonen, Tommi Suni, Jyrki Kiihamäki, Eero Santala, Markku Leskelä,
Sensors and Actuators A Physical

References

YearCitations

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