Concepedia

James Dekker

JD

Statistics

Publications

32

Citations

944

H-Index

20

Active since

1995

Affiliations

VTT Technical Research Centre of Finland(Current)

Helsinki Institute of Physics

Tieto (Finland)

University of Helsinki

James Dekker is an author at VTT Technical Research Centre of Finland specializing in materials science, engineering, and materials engineering.

Publications per year

1995–2022

32

Publications

32

Chemical Free Room Temperature Wafer To Wafer Direct Bonding

Shari Farrens, James Dekker, Jason Kenneth Smith et al. · Journal of The Electrochemical Society · 1995 · 146 citations

Engineering, Materials Engineering, Materials Science +14

Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators

Antti Jaakkola, Mika Prunnila, Tuomas Pensala et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2014 · 74 citations · Full text

Engineering, Materials Science, Physics +17

Temperature compensation of silicon MEMS Resonators by Heavy Doping

Tuomas Pensala, Antti Jaakkola, Mika Prunnila et al. · 2011 · 63 citations

Engineering, Electrical Engineering, Materials Science +17

Inductively coupled plasma etching of amorphous Al2O3 and TiO2 mask layers grown by atomic layer deposition

James Dekker, Kai Kolari, Riikka L. Puurunen · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +17

Development of multi-step processing in silicon-on-insulator for optical waveguide applications

Kimmo Solehmainen, Timo Aalto, James Dekker et al. · Journal of Optics A Pure and Applied Optics · 2006 · 40 citations

Engineering, Materials Engineering, Materials Science +14

1–5 of 32