Concepedia

James Dekker

JD

32

Publications

934

Citations

19

H-Index

1995

Active since

Affiliations

VTT Technical Research Centre of Finland(Current)

Helsinki Institute of Physics

University of Helsinki

STMicroelectronics (Italy)

James Dekker is an author at VTT Technical Research Centre of Finland specializing in engineering, applied physics, and microfabrication.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMicrofabricationMaterial ScienceElectrical EngineeringElectronic PackagingPhysicsSurface ScienceMaterials Engineering

Publications per year

1995–2022

32

Publications

32

Chemical Free Room Temperature Wafer To Wafer Direct Bonding

Shari Farrens, James Dekker, Jason Kenneth Smith et al. · Journal of The Electrochemical Society · 1995 · 146 citations

Engineering, Integrated Circuits, Vacuum Device +16

Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators

Antti Jaakkola, Mika Prunnila, Tuomas Pensala et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2014 · 72 citations · Full text

Temperature compensation of silicon MEMS Resonators by Heavy Doping

Tuomas Pensala, Antti Jaakkola, Mika Prunnila et al. · 2011 · 63 citations

Materials Science, Electrical Engineering, Engineering +12

Inductively coupled plasma etching of amorphous Al2O3 and TiO2 mask layers grown by atomic layer deposition

James Dekker, Kai Kolari, Riikka L. Puurunen · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 46 citations

Engineering, Vacuum Device, Chemical Deposition +16

Development of multi-step processing in silicon-on-insulator for optical waveguide applications

Kimmo Solehmainen, Timo Aalto, James Dekker et al. · Journal of Optics A Pure and Applied Optics · 2006 · 40 citations

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