Concepedia

Tuomas Pensala

TP

28

Publications

836

Citations

17

H-Index

2003

Active since

Affiliations

VTT Technical Research Centre of Finland(Current)

Aalto University

Helsinki Institute of Physics

Georgia Institute of Technology

Tuomas Pensala is an author at VTT Technical Research Centre of Finland specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMicrofabricationElectrical EngineeringUltrasoundMechanical EngineeringMaterial ScienceVibrationInstrumentation

Publications per year

2003–2022

28

Publications

28

A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films

Jialin Wang, Mingyo Park, Stefan Mertin et al. · Journal of Microelectromechanical Systems · 2020 · 137 citations

Optical Materials, Engineering, Acoustic Metamaterial +19

Analysis of anchor and interface losses in piezoelectric MEMS resonators

Attilio Frangi, Massimiliano Cremonesi, Antti Jaakkola et al. · Sensors and Actuators A Physical · 2012 · 89 citations

Electrical Engineering, Energy Harvesting, Engineering +11

Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators

Antti Jaakkola, Mika Prunnila, Tuomas Pensala et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2014 · 72 citations · Full text

Temperature compensation of silicon MEMS Resonators by Heavy Doping

Tuomas Pensala, Antti Jaakkola, Mika Prunnila et al. · 2011 · 63 citations

Materials Science, Electrical Engineering, Engineering +12

Stability and residual stresses of sputtered wurtzite AlScN thin films

Elmeri Österlund, Glenn Ross, A. Miguel et al. · Physical Review Materials · 2021 · 38 citations · Full text

Aluminium Nitride, Engineering, Piezoelectric Properties +16

Rows per page

1–5 of 28