Concepedia

Kai Kolari

KK

11

Publications

358

Citations

10

H-Index

2005

Active since

Affiliations

VTT Technical Research Centre of Finland(Current)

Tieto (Finland)

University of Helsinki

Kai Kolari is an author at VTT Technical Research Centre of Finland specializing in engineering, microfabrication, and applied physics.

Top concepts

EngineeringMicrofabricationApplied PhysicsMicroelectronicsMicrofluidicsSurface ScienceMaterial ScienceAnalytical ChemistryOptoelectronicsBiomedical Engineering

Publications per year

2005–2012

11

Publications

11

Deep plasma etching of glass for fluidic devices with different mask materials

Kai Kolari, Ville Saarela, Sami Franssila · Journal of Micromechanics and Microengineering · 2008 · 66 citations

Fluidic Devices, Engineering, Integrated Circuits +19

Deep plasma etching of glass with a silicon shadow mask

Kai Kolari · Sensors and Actuators A Physical · 2007 · 58 citations

Engineering, Electron-beam Lithography, Beam Lithography +8

Inductively coupled plasma etching of amorphous Al2O3 and TiO2 mask layers grown by atomic layer deposition

James Dekker, Kai Kolari, Riikka L. Puurunen · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 46 citations

Engineering, Vacuum Device, Chemical Deposition +16

Dry-etched silicon-on-insulator waveguides with low propagation and fiber-coupling losses

Kimmo Solehmainen, Timo Aalto, James Dekker et al. · Journal of Lightwave Technology · 2005 · 37 citations

Photonics, Electrical Engineering, Waveguides +14

A Microfabricated Nebulizer for Liquid Vaporization in Chemical Analysis

Sami Franssila, Seppo Marttila, Kai Kolari et al. · Journal of Microelectromechanical Systems · 2006 · 33 citations

Liquid Vaporization, Chemical Engineering, Miniaturized Nebulizer Chip +13

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