Kai Kolari - Concepedia

Author

Kai Kolari

VTT Technical Research Centre of Finland

Also Known As

K Kolari, K. Kolari, Kai Kolari

Publications

550

Citations

H-Index

Concepts

All Affiliations

VTT Technical Research Centre of Finland Tieto (Finland)University of Helsinki

About

Kai Kolari is an author at VTT Technical Research Centre of Finland specializing in engineering, microfabrication, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	10	11	358
2	Applied Physics	5	5	236
3	Biomedical Engineering	3	3	47
4	Medicine	1	1	28
5	Chemical Engineering	1	1	33

Kai Kolari

Publications

358

Citations

H-Index

Page 1

	Year	Citations
Deep plasma etching of glass for fluidic devices with different mask materials Kai Kolari, Ville Saarela, Sami Franssila Journal of Micromechanics and Microengineering Fluidic DevicesEngineeringIntegrated CircuitsSilicon On InsulatorPlasma Processing	2008	66
Deep plasma etching of glass with a silicon shadow mask Kai Kolari Sensors and Actuators A Physical EngineeringElectron-beam LithographyBeam LithographyMicrofabricationOptical Properties	2007	58
Inductively coupled plasma etching of amorphous Al2O3 and TiO2 mask layers grown by atomic layer deposition James Dekker, Kai Kolari, Riikka L. Puurunen Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringVacuum DeviceChemical DepositionPlasma ProcessingRf Bias	2006	46
Dry-etched silicon-on-insulator waveguides with low propagation and fiber-coupling losses Kimmo Solehmainen, Timo Aalto, James Dekker, Journal of Lightwave Technology PhotonicsElectrical EngineeringWaveguidesOptical Rib WaveguidesEngineering	2005	37
A Microfabricated Nebulizer for Liquid Vaporization in Chemical Analysis Sami Franssila, Seppo Marttila, Kai Kolari, Journal of Microelectromechanical Systems Liquid VaporizationChemical EngineeringMiniaturized Nebulizer ChipEngineeringAnalytical Instrumentation	2006	33
High etch selectivity for plasma etching SiO2 with AlN and Al2O3 masks Kai Kolari Microelectronic Engineering Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied Physics	2008	29
Integrated liquid chromatography–heated nebulizer microchip for mass spectrometry Markus Haapala, Ville Saarela, Jaroslav Pól, Analytica Chimica Acta EngineeringGas ChromatographyMedicineAnalytical MicrosystemsMass Spectrometry	2010	28
Real-time analysis of PCR inhibition on microfluidic materials Kai Kolari, Reetta Satokari, Kari Kataja, Sensors and Actuators B Chemical EngineeringAnalytical MicrosystemsLab-on-a-chipBiomedical AnalysisAnalytical Chemistry	2007	21
Investigation of thin polymer layers for biosensor applications András Saftics, Emil Agócs, Bálint Fodor, Applied Surface Science EngineeringSmart PolymerBiosensing SystemsPolymer ScienceBiosensor Applications	2012	16
Tunable hydrophilicity on a hydrophobic fluorocarbon polymer coating on silicon Kai Kolari, Ari Hokkanen Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials ScienceEngineeringHydrophobic Fluorocarbon PolymerBeam LithographyMicrofabrication	2006	14

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