Concepedia

I. Suni

IS

Statistics

Publications

50

Citations

1.7K

H-Index

24

Active since

1981

Affiliations

VTT Technical Research Centre of Finland(Current)

California Institute of Technology

University of California San Diego

Los Alamos National Laboratory

Helsinki Institute of Physics

I. Suni is an author at VTT Technical Research Centre of Finland specializing in materials science, materials engineering, and engineering.

Publications per year

1981–2005

50

Publications

50

Reactive sputter deposition and properties of TaxN thin films

Tommi Riekkinen, J. M. Molarius, Tomi Laurila et al. · Microelectronic Engineering · 2002 · 159 citations

Natural Sciences, Materials Engineering, Materials Science +14

Compensating impurity effect on epitaxial regrowth rate of amorphized Si

I. Suni, G. Göltz, M. G. Grimaldi et al. · Applied Physics Letters · 1982 · 128 citations

Engineering, Materials Engineering, Materials Science +17

Effects of electrically active impurities on the epitaxial regrowth rate of amorphized silicon and germanium

I. Suni, G. Göltz, M‐A. Nicolet et al. · Thin Solid Films · 1982 · 107 citations

Engineering, Materials Engineering, Materials Science +16

Thermal Oxidation of Reactively Sputtered Titanium Nitride and Hafnium Nitride Films

I. Suni, D. Sigurd, K. T. Ho et al. · Journal of The Electrochemical Society · 1983 · 93 citations

Natural Sciences, Materials Engineering, Materials Science +16

Failure mechanism of Ta diffusion barrier between Cu and Si

Tomi Laurila, Kejun Zeng, J.K. Kivilahti et al. · Journal of Applied Physics · 2000 · 90 citations

Engineering, Materials Engineering, Materials Science +17

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