Tommi Riekkinen - Concepedia

Author

Tommi Riekkinen

VTT Technical Research Centre of Finland

Also Known As

T Riekkinen, T. Riekkinen, Tommi Riekkinen

Publications

814

Citations

H-Index

Concepts

All Affiliations

VTT Technical Research Centre of Finland Helsinki Institute of Physics University of California, Berkeley Aalto University

About

Tommi Riekkinen is an author at VTT Technical Research Centre of Finland specializing in engineering, materials science, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	11	12	761
2	Materials Science	9	9	711
3	Applied Physics	8	8	641
4	Electrical Engineering	4	4	46
5	Materials Engineering	3	3	548

Tommi Riekkinen

Publications

761

Citations

H-Index

Page 1

	Year	Citations
Piezoelectric coefficients and spontaneous polarization of ScAlN A. Miguel, Siyuan Zhang, Tommi Riekkinen, Journal of Physics Condensed Matter EngineeringMechanical EngineeringPiezoelectric CoefficientsPiezoelectric ResonatorPolariton Dynamic	2015	337
Reactive sputter deposition and properties of TaxN thin films Tommi Riekkinen, J. M. Molarius, Tomi Laurila, Microelectronic Engineering Materials ScienceMaterials EngineeringEngineeringSurface ScienceApplied Physics	2002	159
Surface acoustic wave devices on AlN/3C–SiC/Si multilayer structures Chih‐Ming Lin, Yung-Yu Chen, Valery V. Felmetsger, Journal of Micromechanics and Microengineering Materials ScienceSurface Acoustic WaveEngineeringAcoustic MetamaterialSurface Science	2013	70
Tantalum carbide and nitride diffusion barriers for Cu metallisation Tomi Laurila, Ke Zeng, J.K. Kivilahti, Microelectronic Engineering Materials EngineeringMaterials ScienceTantalum CarbideEngineeringCorrosion	2002	52
Nickel stamp fabrication using step & stamp imprint lithography Tomi Haatainen, Päivi Majander, Tommi Riekkinen, Microelectronic Engineering Materials ScienceEngineeringBeam LithographyMicrofabricationFabrication Technique	2006	42
Piezoelectrically transduced single-crystal-silicon plate resonators Antti Jaakkola, Piia Rosenberg, Samuli Asmala, EngineeringAcoustic MetamaterialMechanical EngineeringVibrationsLaser Interferometry	2008	29
Reactively sputtered tantalum pentoxide thin films for integrated capacitors Tommi Riekkinen Microelectronic Engineering Materials ScienceEngineeringOxide ElectronicsSurface ScienceThin Film Process Technology	2003	14
P2G-3 Piezotransduced Single-Crystal Silicon BAW Resonators A. Jaakkola, Paul Rosenberg, A. Nurmela, Proceedings/Proceedings - IEEE Ultrasonics Symposium Materials ScienceElectrical EngineeringEngineeringMicrofabricationTransduction Mechanism	2007	13
Ferroelectric parallel-plate capacitors with copper electrodes for high-frequency applications Tommi Riekkinen, Tomi Mattila, Sebastiaan van Dijken, Applied Physics Letters Materials ScienceElectrical EngineeringSupercapacitorsEngineeringFerroelectric Application	2007	12
Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AlN resonators Tommi Riekkinen, A. Nurmela, J. M. Molarius, Thin Solid Films Materials ScienceAluminium NitrideEngineeringPhysical AcousticAcoustic Metamaterial	2009	12

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