Concepedia

Tommi Riekkinen

TR

12

Publications

761

Citations

11

H-Index

2002

Active since

Affiliations

VTT Technical Research Centre of Finland(Current)

Helsinki Institute of Physics

University of California, Berkeley

Aalto University

Tommi Riekkinen is an author at VTT Technical Research Centre of Finland specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsThin FilmsMicroelectronicsMicrofabricationElectrical EngineeringMechanical EngineeringSurface ScienceMaterials Engineering

Publications per year

2002–2015

12

Publications

12

Piezoelectric coefficients and spontaneous polarization of ScAlN

A. Miguel, Siyuan Zhang, Tommi Riekkinen et al. · Journal of Physics Condensed Matter · 2015 · 337 citations

Engineering, Mechanical Engineering, Piezoelectric Coefficients +16

Reactive sputter deposition and properties of TaxN thin films

Tommi Riekkinen, J. M. Molarius, Tomi Laurila et al. · Microelectronic Engineering · 2002 · 159 citations

Materials Science, Materials Engineering, Engineering +6

Surface acoustic wave devices on AlN/3C–SiC/Si multilayer structures

Chih‐Ming Lin, Yung-Yu Chen, Valery V. Felmetsger et al. · Journal of Micromechanics and Microengineering · 2013 · 70 citations

Materials Science, Surface Acoustic Wave, Engineering +10

Tantalum carbide and nitride diffusion barriers for Cu metallisation

Tomi Laurila, Ke Zeng, J.K. Kivilahti et al. · Microelectronic Engineering · 2002 · 52 citations

Materials Engineering, Materials Science, Tantalum Carbide +6

Nickel stamp fabrication using step & stamp imprint lithography

Tomi Haatainen, Päivi Majander, Tommi Riekkinen et al. · Microelectronic Engineering · 2006 · 42 citations

Materials Science, Engineering, Beam Lithography +5

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