Tommi Riekkinen

Statistics

Publications

Citations

768

H-Index

Active since

2002

Affiliations

VTT Technical Research Centre of Finland(Current)

Helsinki Institute of Physics

University of California, Berkeley

Aalto University

Tommi Riekkinen is an author at VTT Technical Research Centre of Finland specializing in materials science, electronic materials, and natural sciences.

Publications per year

2002–2015

Publications

Piezoelectric coefficients and spontaneous polarization of ScAlN

Siyuan Zhang, Tommi Riekkinen, Markku Ylilammi et al. · Journal of Physics Condensed Matter · 2015 · 344 citations

Natural Sciences, Materials Science, Physics +16

Reactive sputter deposition and properties of TaxN thin films

Tommi Riekkinen, J. M. Molarius, Tomi Laurila et al. · Microelectronic Engineering · 2002 · 159 citations

Natural Sciences, Materials Engineering, Materials Science +14

Surface acoustic wave devices on AlN/3C–SiC/Si multilayer structures

Chih‐Ming Lin, Yung-Yu Chen, Valery V. Felmetsger et al. · Journal of Micromechanics and Microengineering · 2013 · 70 citations

Natural Sciences, Materials Engineering, Materials Science +17

Tantalum carbide and nitride diffusion barriers for Cu metallisation

Tomi Laurila, Ke Zeng, J.K. Kivilahti et al. · Microelectronic Engineering · 2002 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +14

Nickel stamp fabrication using step & stamp imprint lithography

Tomi Haatainen, Päivi Majander, Tommi Riekkinen et al. · Microelectronic Engineering · 2006 · 42 citations

Engineering, Materials Engineering, Materials Science +11

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