Concepedia
Microelectronic Engineering · 2006 · 42 citations · 2 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMetallurgyMicrofabricationMetal FabricationSoft LithographyStamping ProcessesThin Film LithographyImprint LithographyStampingStep Imprint LithographyStep-and-repeat Lithography
2
Imprint of sub-25 nm vias and trenches in polymers
Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations
Engineering, Manufacturing Engineering, Materials Science +15
Nanoimprint lithography
Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 1.7K citations
Engineering, Electrical Engineering, Manufacturing Engineering +13