Concepedia

Step Imprint Lithography

Step Imprint Lithography is a nanoimprint lithography technique that belongs to the class of serial patterning methods, distinguished by its localized, step-by-step application of pressure and replication of nanoscale features on a substrate through a rigid mold, enabling high-resolution pattern transfer over discrete areas in a controllable and repeatable manner.

68

Publications

2.8K

Citations

184

Authors

42

Institutions

Publications per year

2017–2026

0

Parents

Publications

68

Step and flash imprint lithography: Template surface treatment and defect analysis

T. C. Bailey, Byung Jin Choi, Matthew Colburn et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 359 citations

, , +14

Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography

Paul Ruchhoeft, Matthew Colburn, Byung Jin Choi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 154 citations

, , +13

Nanoimprint Lithography Materials Development for Semiconductor Device Fabrication

Elizabeth A. Costner, Michael W. Lin, Wei-Lun Jen et al. · Annual Review of Materials Research · 2009 · 142 citations

, , +13

Imprint lithography for integrated circuit fabrication

Douglas J. Resnick, William J. Dauksher, David P. Mancini et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 121 citations

, , +10

Design of orientation stages for step and flash imprint lithography

Byung Jin Choi, S. V. Sreenivasan, Stephen Johnson et al. · Precision Engineering · 2001 · 106 citations

, , +10

1–5 of 68

Authors

184

  1. CG
    C. Grant Willson

    The University of Texas at Austin, United States

    26 publications · 1.7K citations

    22

    h-index

  2. JG
    John G. Ekerdt

    The University of Texas at Austin, United States

    14 publications · 1.1K citations

    14

    h-index

  3. SV
    S. V. Sreenivasan

    The University of Texas at Austin, United States

    18 publications · 1.1K citations

    14

    h-index

  4. DJ
    Douglas J. Resnick

    Motorola (United States), United States

    19 publications · 613 citations

    14

    h-index

  5. KJ
    Kevin J. Nordquist

    Motorola (United States), United States

    13 publications · 510 citations

    11

    h-index

1–5 of 184

Institutions

42

  1. The University of Texas at Austin

    Austin, United States

    23 h-index

    167 publications

    11.7K citations

  2. Motorola (United States)

    Schaumburg, United States

    13 h-index

    81 publications

    3.2K citations

  3. VTT Technical Research Centre of Finland

    Espoo, Finland

    4 h-index

    9 publications

    272 citations

  4. AGH University of Krakow

    Krakow, Poland

    3 h-index

    10 publications

    203 citations

  5. Cardiff University

    Cardiff, United Kingdom

    3 h-index

    11 publications

    163 citations

  6. Physical Sciences (United States)

    Andover, United States

    2 h-index

    16 publications

    1K citations

  7. University of Houston

    Houston, United States

    2 h-index

    4 publications

    482 citations

  8. Sprint (United States)

    Overland Park, United States

    2 h-index

    15 publications

    219 citations

1–8 of 42

Venues

  1. 14

    h-index

  2. 14

    h-index

  3. Microelectronic Engineering

    9 publications · 282 citations

    9

    h-index

  4. Journal of Photopolymer Science and Technology

    3 publications · 137 citations

    3

    h-index

  5. 3

    h-index

1–5