David P. Mancini

Imprint lithography for integrated circuit fabrication

Douglas J. Resnick, William J. Dauksher, David P. Mancini et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 120 citations

Engineering, Micromanufacturing, Integrated Circuits +20

Template fabrication schemes for step and flash imprint lithography

T. C. Bailey, Douglas J. Resnick, David P. Mancini et al. · Microelectronic Engineering · 2002 · 106 citations

Materials Science, Engineering, Beam Lithography +5

Hydrogen silsesquioxane for direct electron-beam patterning of step and flash imprint lithography templates

David P. Mancini, K. A. Gehoski, Eric S. Ainley et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 52 citations

Direct Patterning, Engineering, Electron-beam Lithography +22

Characterization of and imprint results using indium tin oxide-based step and flash imprint lithography templates

William J. Dauksher, Kevin J. Nordquist, David P. Mancini et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 43 citations · Full text

Crystal Structure, Engineering, Imprint Results +16

High-resolution templates for step and flash imprint lithography

Douglas J. Resnick, William J. Dauksher, David P. Mancini et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 43 citations

Engineering, Electron-beam Lithography, Microscopy +18