Eric S. Ainley

Template fabrication schemes for step and flash imprint lithography

T. C. Bailey, Douglas J. Resnick, David P. Mancini et al. · Microelectronic Engineering · 2002 · 106 citations

Materials Science, Engineering, Beam Lithography +5

Hydrogen silsesquioxane for direct electron-beam patterning of step and flash imprint lithography templates

David P. Mancini, K. A. Gehoski, Eric S. Ainley et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 52 citations

Direct Patterning, Engineering, Electron-beam Lithography +22

High-resolution templates for step and flash imprint lithography

Douglas J. Resnick, William J. Dauksher, David P. Mancini et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 43 citations

Engineering, Electron-beam Lithography, Microscopy +18

Nano-imprint lithography: Templates, imprinting and wafer pattern transfer

William J. Dauksher, Ngoc Van Le, Eric S. Ainley et al. · Microelectronic Engineering · 2006 · 30 citations

Materials Science, Nano-imprint Lithography, Engineering +9

Process optimization of a chemically amplified negative resist for electron beam exposure and mask making applications

Eric S. Ainley, Kevin J. Nordquist, Douglas J. Resnick et al. · Microelectronic Engineering · 1999 · 14 citations

Engineering, Beam Lithography, Electron-beam Lithography +7