Concepedia

Publication | Closed Access

Nano-imprint lithography: Templates, imprinting and wafer pattern transfer

DOI

30

Citations

5

References

2006

Year

William J. Dauksher, Ngoc Van Le, Eric S. Ainley, Kevin J. Nordquist, K. A. Gehoski, Steve Young, J. Baker, Diana Convey, Pawitter Mangat
Microelectronic Engineering

References

YearCitations

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