K. A. Gehoski

Template fabrication schemes for step and flash imprint lithography

T. C. Bailey, Douglas J. Resnick, David P. Mancini et al. · Microelectronic Engineering · 2002 · 106 citations

Materials Science, Engineering, Beam Lithography +5

Hydrogen silsesquioxane for direct electron-beam patterning of step and flash imprint lithography templates

David P. Mancini, K. A. Gehoski, Eric S. Ainley et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 52 citations

Direct Patterning, Engineering, Electron-beam Lithography +22

Distortion and overlay performance of UV step and repeat imprint lithography

Jin Choi, Kevin J. Nordquist, Ashuman Cherala et al. · Microelectronic Engineering · 2005 · 38 citations

Electron-beam Lithography, Beam Lithography, Microfabrication +5

Effects of etch barrier densification on step and flash imprint lithography

Steve Johnson, Ryan L. Burns, E. K. Kim et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 36 citations

Engineering, Electron-beam Lithography, Mechanical Engineering +21

Nano-imprint lithography: Templates, imprinting and wafer pattern transfer

William J. Dauksher, Ngoc Van Le, Eric S. Ainley et al. · Microelectronic Engineering · 2006 · 30 citations

Materials Science, Nano-imprint Lithography, Engineering +9