Concepedia

Publication | Closed Access

Fabrication of multi-tiered structures on step and flash imprint lithography templates

DOI

23

Citations

9

References

2003

Year

Stephen Johnson, Douglas J. Resnick, David P. Mancini, Kevin J. Nordquist, William J. Dauksher, K. A. Gehoski, J. Baker, Laura Dues, Andrew E. Hooper, T. C. Bailey,
Microelectronic Engineering

References

YearCitations

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