T. C. Bailey

Step and flash imprint lithography: Template surface treatment and defect analysis

T. C. Bailey, Byung Jin Choi, Matthew Colburn et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 359 citations

Engineering, Materials Engineering, Materials Science +14

Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography

Paul Ruchhoeft, Matthew Colburn, Byung Jin Choi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 154 citations

Engineering, Materials Engineering, Materials Science +13

Imprint lithography for integrated circuit fabrication

Douglas J. Resnick, William J. Dauksher, David P. Mancini et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 121 citations

Engineering, Manufacturing Engineering, Materials Science +10

Template fabrication schemes for step and flash imprint lithography

T. C. Bailey, Douglas J. Resnick, David P. Mancini et al. · Microelectronic Engineering · 2002 · 106 citations

Engineering, Materials Engineering, Materials Science +12

Step and Flash Imprint Lithography: An Efficient Nanoscale Printing Technology.

T. C. Bailey, Stephen C. Johnson, S. V. Sreenivasan et al. · Journal of Photopolymer Science and Technology · 2002 · 84 citations · Full text

Engineering, Materials Engineering, Materials Science +15