Concepedia

Publication | Closed Access

Template fabrication schemes for step and flash imprint lithography

DOI

106

Citations

5

References

2002

Year

T. C. Bailey, Douglas J. Resnick, David P. Mancini, Kevin J. Nordquist, William J. Dauksher, Eric S. Ainley, A. Alec Talin, K. A. Gehoski, J. Baker, Byung Jin Choi,
Microelectronic Engineering

References

YearCitations

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