Steven M. Smith

Survey of methods to characterize thin absorbing films with Spectroscopic Ellipsometry

James N. Hilfiker, Neha Singh, Tom Tiwald et al. · Thin Solid Films · 2008 · 305 citations

Materials Science, Optical Materials, Engineering +10

Decreased IFN- γ and increased IL-4 production by human CD8+ T cells in response toMycobacterium tuberculosis in tuberculosis patients

Steven M. Smith, Michèl R. Klein, Adam Malin et al. · Tuberculosis · 2002 · 57 citations

Inflammation, Response Tomycobacterium Tuberculosis, Pulmonary Tuberculosis +14

Analysis of silicon oxynitrides with spectroscopic ellipsometry and Auger spectroscopy, compared to analyses by Rutherford backscattering spectrometry and Fourier transform infrared spectroscopy

Harland G. Tompkins, R. B. Gregory, Paul W. Deal et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 22 citations

Engineering, Auger Analysis, Auger Analyses +16

Uniform low stress oxynitride films for application as hardmasks on x-ray masks

William J. Dauksher, Douglas J. Resnick, Steven M. Smith et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 14 citations

X-ray Spectroscopy, Engineering, X-ray Masks +23