Concepedia

Paul W. Deal

PW

3

Publications

107

Citations

3

H-Index

1993

Active since

Affiliations

Motorola (United States)(Current)

Paul W. Deal is an author at Motorola (United States) specializing in chemistry, engineering, and surface science.

Top concepts

Publications per year

1993–1999

3

Publications

3

Novel Synthetic Routes to Carbon Nitride

Michael Todd, John Kouvetakis, Thomas L. Groy et al. · Chemistry of Materials · 1995 · 62 citations

, , +10

Kinetics and mechanism for desorption of H2O from spin-on-glass

Harland G. Tompkins, Paul W. Deal · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 23 citations

, , +17

Analysis of silicon oxynitrides with spectroscopic ellipsometry and Auger spectroscopy, compared to analyses by Rutherford backscattering spectrometry and Fourier transform infrared spectroscopy

Harland G. Tompkins, R. B. Gregory, Paul W. Deal et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 22 citations

, , +16

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