Matthew Colburn

Step and flash imprint lithography: a new approach to high-resolution patterning

Matthew Colburn, Stephen C. Johnson, M. D. Stewart et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 564 citations

Engineering, Materials Engineering, Materials Science +16

Polymer self assembly in semiconductor microelectronics

Charles T. Black, Ricardo Ruiz, Greg Breyta et al. · IBM Journal of Research and Development · 2007 · 403 citations

Engineering, Materials Engineering, Materials Science +17

Step and flash imprint lithography: Template surface treatment and defect analysis

T. C. Bailey, Byung Jin Choi, Matthew Colburn et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 359 citations

Engineering, Materials Engineering, Materials Science +14

Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist

Joy Cheng, Daniel P. Sanders, Hoa D. Truong et al. · ACS Nano · 2010 · 216 citations

Natural Sciences, Materials Engineering, Materials Science +17

Two-Dimensional Pattern Formation Using Graphoepitaxy of PS-<i>b</i>-PMMA Block Copolymers for Advanced FinFET Device and Circuit Fabrication

Hsinyu Tsai, Jed W. Pitera, Hiroyuki Miyazoe et al. · ACS Nano · 2014 · 155 citations

Engineering, Electrical Engineering, Materials Science +15