Hoa D. Truong

Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist

Joy Cheng, Daniel P. Sanders, Hoa D. Truong et al. · ACS Nano · 2010 · 216 citations

Natural Sciences, Materials Engineering, Materials Science +17

Self-assembly patterning for sub-15nm half-pitch: a transition from lab to fab

Chris Bencher, Jeffrey Smith, Liyan Miao et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 106 citations

Natural Sciences, Materials Engineering, Materials Science +17

Investigation of Polymer-bound PAGs: Synthesis, Characterization and Initial Structure/Property Relationships of Anion-bound Resists

Robert D. Allen, Phillip J. Brock, Young-Hye Na et al. · Journal of Photopolymer Science and Technology · 2009 · 42 citations · Full text

Natural Sciences, Chemistry, Materials Science +15

Polymer design for 157-nm chemically amplified resists

Hiroshi Itô, Gregory M. Wallraff, Phillip J. Brock et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 41 citations

Natural Sciences, Chemistry, Materials Science +10

Development of 157 nm positive resists

Hiroshi Itô, G. M. Wallraff, Nicolette Fender et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 33 citations

Natural Sciences, Chemistry, Materials Science +11