Liyan Miao

Self-assembly patterning for sub-15nm half-pitch: a transition from lab to fab

Chris Bencher, Jeffrey Smith, Liyan Miao et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 106 citations

Natural Sciences, Materials Engineering, Materials Science +17

Directed self-assembly defectivity assessment. Part II

Chris Bencher, He Yi, Jessica Zhou et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 67 citations

Engineering, Manufacturing Engineering, Materials Science +17

Sidewall spacer quadruple patterning for 15nm half-pitch

Ping Xu, Yong Mei Chen, Yijian Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 44 citations

Engineering, Computer Engineering, Electrical Engineering +10

Self-aligned triple patterning for continuous IC scaling to half-pitch 15nm

Yijian Chen, Ping Xu, Liyan Miao et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 27 citations

Engineering, Computer Engineering, Digital Fabrication +16

Mandrel-based patterning: density multiplication techniques for 15nm nodes

Chris Bencher, Huixiong Dai, Liyan Miao et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 20 citations

Engineering, Computer Engineering, Materials Science +9