He Yi

Flexible Control of Block Copolymer Directed Self‐Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning

He Yi, Jie Zhang, Christopher Bencher et al. · Advanced Materials · 2012 · 117 citations

Engineering, Electrical Engineering, Materials Science +16

Directed self-assembly defectivity assessment. Part II

Chris Bencher, He Yi, Jessica Zhou et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 67 citations

Engineering, Manufacturing Engineering, Materials Science +17

Block copolymer directed self-assembly (DSA) aware contact layer optimization for 10 nm 1D standard cell library

Yuelin Du, Daifeng Guo, Martin D. F. Wong et al. · International Conference on Computer Aided Design · 2013 · 46 citations

Engineering, Materials Engineering, Materials Science +11

A General Design Strategy for Block Copolymer Directed Self-Assembly Patterning of Integrated Circuits Contact Holes using an Alphabet Approach

He Yi, R. C. Tiberio, H.‐S. Philip Wong · Nano Letters · 2014 · 45 citations

Engineering, Materials Engineering, Materials Science +15

Design strategy of small topographical guiding templates for sub-15nm integrated circuits contact hole patterns using block copolymer directed self assembly

He Yi, R. C. Tiberio, H.‐S. Philip Wong · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 43 citations

Engineering, Electrical Engineering, Materials Science +17