Yuelin Du

Hybrid lithography optimization with E-Beam and immersion processes for 16nm 1D gridded design

Yuelin Du, Hongbo Zhang, Martin D. F. Wong et al. · 2012 · 54 citations

Engineering, Electron-beam Lithography, Overall Throughput +20

Block copolymer directed self-assembly (DSA) aware contact layer optimization for 10 nm 1D standard cell library

Yuelin Du, Daifeng Guo, Martin D. F. Wong et al. · International Conference on Computer Aided Design · 2013 · 46 citations

Engineering, Molecular Self-assembly, Pattern Transfer +22

Self-aligned double patterning decomposition for overlay minimization and hot spot detection

Hongbo Zhang, Yuelin Du, Martin D. F. Wong et al. · 2011 · 46 citations

Engineering, Sensor Array, Electronic Design Automation +25

Block copolymer directed self-assembly (DSA) aware contact layer optimization for 10 nm 1D standard cell library

Yuelin Du, Daifeng Guo, Martin D. F. Wong et al. · 2013 IEEE/ACM International Conference on Computer-Aided Design (ICCAD) · 2013 · 40 citations

Engineering, Molecular Self-assembly, Pattern Transfer +22

DSA template mask determination and cut redistribution for advanced 1D gridded design

Zigang Xiao, Yuelin Du, Martin D. F. Wong et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 38 citations

Geometric Modeling, Industrial Design, Resist Tune +15