Yuelin Du

Hybrid lithography optimization with E-Beam and immersion processes for 16nm 1D gridded design

Yuelin Du, Hongbo Zhang, Martin D. F. Wong et al. · 2012 · 55 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Self-aligned double patterning decomposition for overlay minimization and hot spot detection

Hongbo Zhang, Yuelin Du, Martin D. F. Wong et al. · 2011 · 47 citations

Engineering, Computer Engineering, Computer Science +13

Block copolymer directed self-assembly (DSA) aware contact layer optimization for 10 nm 1D standard cell library

Yuelin Du, Daifeng Guo, Martin D. F. Wong et al. · International Conference on Computer Aided Design · 2013 · 46 citations

Engineering, Materials Engineering, Materials Science +11

Block copolymer directed self-assembly (DSA) aware contact layer optimization for 10 nm 1D standard cell library

Yuelin Du, Daifeng Guo, Martin D. F. Wong et al. · 2013 IEEE/ACM International Conference on Computer-Aided Design (ICCAD) · 2013 · 40 citations

Engineering, Materials Engineering, Materials Science +11

DSA template mask determination and cut redistribution for advanced 1D gridded design

Zigang Xiao, Yuelin Du, Martin D. F. Wong et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 39 citations

Architecture, Manufacturing Engineering, Computer-aided Design +6