Advanced Materials · 2012 · 117 citations · 32 references
EngineeringElectrical EngineeringMaterials ScienceMicrofabricationSemiconductor DevicesVlsi DesignDigital Integrated Circuit DesignIntegrated Circuit DesignIntegrated Circuit FabricationPhysical DesignSelf-assembled NanostructuresThin Film LithographyBlock Copolymer Self-assemblyCritical Dimension ControlDirected Self-assemblyPolymer Self-assemblySelf-assembling PolymersStatic Random-access Memory DesignTemplated Self-assembly
Block copolymer directed self-assembly (DSA) using small guiding templates for contact hole patterning in integrated circuits is reported. Flexible and precise DSA control of 25 nm contact holes guided by 66 nm templates for industry-standard 22 nm static random access memory cells is experimentally demonstrated. For 22 nm random logic circuits a DSA-aware design methodology is developed and the contact holes are achieved with a critical dimension of 15 nm and overylay accuracy of 1 nm.
32
Controlling Polymer-Surface Interactions with Random Copolymer Brushes
P. Mansky, Y. Liu, E. Huang et al. · Science · 1997 · 1.3K citations