Concepedia

Author

Jeffrey Smith

IBM Research - Almaden

Also Known As

J. Smith, Jeffrey Smith, Jeffrey T. Smith

18

Publications

454

Citations

7

H-Index

33

Concepts

All Affiliations

IBM Research - AlmadenIn-Q-TelApplied Materials (United States)
JS

About

Jeffrey Smith is an author at IBM Research - Almaden specializing in engineering, 3d printing, and microelectronics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

4

4

293

2

Applied Physics

3

3

264

3

Computer Engineering

2

2

209

4

Natural Sciences

1

1

29

5

Social Sciences

1

1

67

Jeffrey Smith

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6

Publications

409

Citations

6

H-Index

YearCitations

Perspective: New process technologies required for future devices and scaling

Robert D. Clark, Kandabara Tapily, K.H. Yu,

APL Materials

2018

180

Self-assembly patterning for sub-15nm half-pitch: a transition from lab to fab

Chris Bencher, Jeffrey Smith, Liyan Miao,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2011

106

Directed self-assembly defectivity assessment. Part II

Chris Bencher, He Yi, Jessica Zhou,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2012

67

CFET Design Options, Challenges, and Opportunities for 3D Integration

Lars W. Liebmann, Jeffrey Smith, D. Chanemougame,

2021 IEEE International Electron Devices Meeting (IEDM)

2021

29

Challenges and mitigation strategies for resist trim etch in resist-mandrel based SAQP integration scheme

Nihar Mohanty, Elliott Franke, Eric Liu,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2015

17

EPE improvement thru self-alignment via multi-color material integration

Nihar Mohanty, Jeffrey Smith, Lior Huli,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2017

10

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