Concepedia

Elliott Franke

EF

3

Publications

157

Citations

3

H-Index

2015

Active since

Affiliations

In-Q-Tel(Current)

IBM Research - Almaden

Elliott Franke is an author at In-Q-Tel specializing in engineering, applied physics, and microfabrication.

Top concepts

Publications per year

2015–2018

3

Publications

3

Directed self-assembly of block copolymers for 7 nanometre FinFET technology and beyond

Chi‐Chun Liu, Elliott Franke, Yann Mignot et al. · Nature Electronics · 2018 · 129 citations

, , +11

Challenges and mitigation strategies for resist trim etch in resist-mandrel based SAQP integration scheme

Nihar Mohanty, Elliott Franke, Eric Liu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 17 citations

, , +15

DSA patterning options for FinFET formation at 7nm node

Chi‐Chun Liu, Elliott Franke, Fee Li Lie et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 11 citations

, , +11

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