Directed self-assembly of block copolymers for 7 nanometre FinFET technology and beyond - Concepedia

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Directed self-assembly of block copolymers for 7 nanometre FinFET technology and beyond

129

Citations

29

References

2018

Year

Chi‐Chun Liu, Elliott Franke, Yann Mignot, Ruilong Xie, Chun Wing Yeung, Jingyun Zhang, Cheng Chi, Chen Zhang, Richard A. Farrell, Kafai Lai,

Nature Electronics

Materials ScienceBlock Co-polymersEngineeringNanomaterialsNanotechnologySelf-assemblyMolecular Self-assemblyApplied PhysicsNanometre Finfet TechnologyBlock CopolymersNatural SciencesNanostructured PolymerChemistryPolymer Self-assembly

References

	Year	Citations

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