Kafai Lai

Directed self-assembly of block copolymers for 7 nanometre FinFET technology and beyond

Chi‐Chun Liu, Elliott Franke, Yann Mignot et al. · Nature Electronics · 2018 · 129 citations

Materials Science, Block Co-polymers, Engineering +11

Modeling of stress-induced leakage current in ultrathin oxides with the trap-assisted tunneling mechanism

A. Chou, Kafai Lai, Kiran Kumar et al. · Applied Physics Letters · 1997 · 112 citations

Engineering, Trap-assisted Tunneling Mechanism, Semiconductor Device +17

Optimum mask and source patterns to print a given shape

Alan E. Rosenbluth, S. Bukofsky, M. Hibbs et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 111 citations

Image Reconstruction, Engineering, Optimum Mask +19

Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process

Kafai Lai, Alan E. Rosenbluth, Saeed Bagheri et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 47 citations

Electrical Engineering, Pixelated Illumination, Engineering +15

Intensive optimization of masks and sources for 22nm lithography

Alan E. Rosenbluth, David Melville, Kehan Tian et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 30 citations

Mask Optimization, Engineering, Electron-beam Lithography +11