Alan E. Rosenbluth

Theory of high-NA imaging in homogeneous thin films

Donis G. Flagello, Tom D. Milster, Alan E. Rosenbluth · Journal of the Optical Society of America A · 1996 · 134 citations

Natural Sciences, Biomedical Engineering, Materials Science +17

Optical sources of non-linearity in heterodyne interferometers

Alan E. Rosenbluth, Norman Bobroff · Precision Engineering · 1990 · 118 citations

Natural Sciences, Electrical Engineering, Physics +13

Optimum mask and source patterns to print a given shape

Alan E. Rosenbluth, S. Bukofsky, M. Hibbs et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 112 citations

Architecture, Design, Design Optimization +13

Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process

Kafai Lai, Alan E. Rosenbluth, Saeed Bagheri et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 47 citations

Engineering, Computer Engineering, Electrical Engineering +13

Bragg condition in absorbing x-ray multilayers

Alan E. Rosenbluth, Ping Lee · Applied Physics Letters · 1982 · 35 citations

Natural Sciences, Materials Science, Physics +17