Yann Mignot

Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET

N. Loubet, Terence B. Hook, P. Montanini et al. · 2017 · 939 citations

Engineering, Nanocomputing, Semiconductor Device +17

Directed self-assembly of block copolymers for 7 nanometre FinFET technology and beyond

Chi‐Chun Liu, Elliott Franke, Yann Mignot et al. · Nature Electronics · 2018 · 129 citations

Materials Science, Block Co-polymers, Engineering +11

Tungsten and cobalt metallization: A material study for MOL local interconnects

V. Kamineni, M. Raymond, S. Siddiqui et al. · 2016 · 63 citations

Mol Local Interconnects, Engineering, Cvd W-based Metallization +21

BEOL process integration for the 7 nm technology node

T. Standaert, Genevieve Beique, H.-C. Chen et al. · 2016 · 35 citations

Engineering, Electron-beam Lithography, Device Integration +17

EUV patterning successes and frontiers

Nelson Felix, Dan Corliss, Karen Petrillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 25 citations

Engineering, Electron-beam Lithography, Euv Patterning Successes +18