Yann Mignot

Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET

N. Loubet, Terence B. Hook, P. Montanini et al. · 2017 · 988 citations

Engineering, Electrical Engineering, Microelectronics +15

Directed self-assembly of block copolymers for 7 nanometre FinFET technology and beyond

Chi‐Chun Liu, Elliott Franke, Yann Mignot et al. · Nature Electronics · 2018 · 136 citations

Natural Sciences, Electrical Engineering, Materials Science +14

Tungsten and cobalt metallization: A material study for MOL local interconnects

V. Kamineni, M. Raymond, S. Siddiqui et al. · 2016 · 65 citations

Natural Sciences, Materials Engineering, Materials Science +17

BEOL process integration for the 7 nm technology node

T. Standaert, Genevieve Beique, H.-C. Chen et al. · 2016 · 35 citations

Engineering, Electrical Engineering, Materials Science +12

EUV patterning successes and frontiers

Nelson Felix, Dan Corliss, Karen Petrillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 25 citations

Engineering, Electrical Engineering, Materials Science +15