1
Publications
35
Citations
1
H-Index
2016
Active since
Affiliations
GlobalFoundries (United States)(Current)
H.-C. Chen is an author at GlobalFoundries (United States) specializing in applied physics, engineering, and computer engineering.
Top concepts
EngineeringApplied PhysicsNanoelectronicsMaterial ScienceMicroelectronicsMicrofabricationComputer EngineeringElectronic PackagingMaterials EngineeringElectrical Engineering
Publications per year
2016–2016
1
1
BEOL process integration for the 7 nm technology node
T. Standaert, Genevieve Beique, H.-C. Chen et al. · 2016 · 35 citations
Engineering, Electron-beam Lithography, Device Integration +17
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