Concepedia

Genevieve Beique

GB

4

Publications

96

Citations

4

H-Index

2015

Active since

Affiliations

GlobalFoundries (United States)(Current)

IBM (United States)

Genevieve Beique is an author at GlobalFoundries (United States) specializing in microelectronics, engineering, and computer engineering.

Top concepts

EngineeringMicroelectronicsMicrofabricationComputer EngineeringElectronic PackagingElectrical Engineering3D PrintingApplied PhysicsMaterials EngineeringProbability

Publications per year

2015–2016

4

Publications

4

BEOL process integration for the 7 nm technology node

T. Standaert, Genevieve Beique, H.-C. Chen et al. · 2016 · 35 citations

Engineering, Electron-beam Lithography, Device Integration +17

EUV patterning successes and frontiers

Nelson Felix, Dan Corliss, Karen Petrillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 25 citations

Engineering, Electron-beam Lithography, Euv Patterning Successes +18

Comparison of left and right side line edge roughness in lithography

Lei Sun, Nicole Saulnier, Genevieve Beique et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 20 citations

Lithography Process, Engineering, Electron-beam Lithography +8

EUV processing and characterization for BEOL

Nicole Saulnier, Yongan Xu, Wenhui Wang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 16 citations

Computational Lithography, Engineering, Electron-beam Lithography +17

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