Dan Corliss

Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET

N. Loubet, Terence B. Hook, P. Montanini et al. · 2017 · 939 citations

Engineering, Nanocomputing, Semiconductor Device +17

EUV patterning successes and frontiers

Nelson Felix, Dan Corliss, Karen Petrillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 25 citations

Engineering, Electron-beam Lithography, Euv Patterning Successes +18

45-nm silicon-on-insulator CMOS technology integrating embedded DRAM for high-performance server and ASIC applications

Subramanian S. Iyer, G. Freeman, Colin J. Brodsky et al. · IBM Journal of Research and Development · 2011 · 18 citations

Engineering, Vlsi Design, Emerging Memory Technology +16

Overlay characterization and matching of immersion photoclusters

Blandine Minghetti, Timothy A. Brunner, Christopher F. Robinson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 11 citations

First microprocessors with immersion lithography

Darı́o Gil, T. C. Bailey, Dan Corliss et al. · Optical Microlithography XVIII · 2005 · 11 citations

Engineering, Computer Architecture, Optoelectronic Devices +19