Dan Corliss

Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET

N. Loubet, Terence B. Hook, P. Montanini et al. · 2017 · 988 citations

Engineering, Electrical Engineering, Microelectronics +15

EUV patterning successes and frontiers

Nelson Felix, Dan Corliss, Karen Petrillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 25 citations

Engineering, Electrical Engineering, Materials Science +15

45-nm silicon-on-insulator CMOS technology integrating embedded DRAM for high-performance server and ASIC applications

Subramanian S. Iyer, G. Freeman, Colin J. Brodsky et al. · IBM Journal of Research and Development · 2011 · 19 citations

Engineering, Computer Engineering, Electrical Engineering +17

Overlay characterization and matching of immersion photoclusters

Blandine Minghetti, Timothy A. Brunner, Christopher F. Robinson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 12 citations

Engineering, Digital Design, Condition Assessment +9

First microprocessors with immersion lithography

Darı́o Gil, T. C. Bailey, Dan Corliss et al. · Optical Microlithography XVIII · 2005 · 11 citations

Engineering, Computer Engineering, Electrical Engineering +12