Nanostructure engineering by templated self-assembly of block copolymers

Joy Cheng, Anne M. Mayes, Caroline A. Ross

Nature Materials

Materials ScienceBlock Co-polymersEngineeringSelf-assemblyApplied Physics +4

Dense Self‐Assembly on Sparse Chemical Patterns: Rectifying and Multiplying Lithographic Patterns Using Block Copolymers

Joy Cheng, Charles Rettner, Daniel P. Sanders, +2

Advanced Materials

EngineeringElectron-beam LithographyMolecular Self-assemblyPattern TransferBeam Lithography +17

Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist

Joy Cheng, Daniel P. Sanders, Hoa D. Truong, +5

ACS Nano

Polarity-switched PhotoresistEngineeringElectron-beam LithographyMolecular Self-assemblyOptoelectronic Devices +21

Three‐Dimensional Nanofabrication by Block Copolymer Self‐Assembly

Caroline A. Ross, Karl K. Berggren, Joy Cheng, +2

Advanced Materials

Two-Dimensional Pattern Formation Using Graphoepitaxy of PS-<i>b</i>-PMMA Block Copolymers for Advanced FinFET Device and Circuit Fabrication

Hsinyu Tsai, Jed W. Pitera, Hiroyuki Miyazoe, +10

ACS Nano

EngineeringMolecular Self-assemblyPattern TransferCircuit Relevant PatterningNanoelectronics +15

Self-assembly patterning for sub-15nm half-pitch: a transition from lab to fab

Chris Bencher, Jeffrey Smith, Liyan Miao, +8

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Facile postpolymerization end‐modification of RAFT polymers

Jason M. Spruell, Benjamin Levy, Alexander J. Sutherland, +4

Journal of Polymer Science Part A Polymer Chemistry

EngineeringResponsive PolymersChemistryPolymersMacromolecular Engineering +14

Self-Assembled One-Dimensional Nanostructure Arrays

Joy Cheng, Feng Zhang, Vivian P. Chuang, +2

Nano Letters

Materials ScienceNanoparticlesGroove WidthBlock Co-polymersEngineering +13

Directed Self-Assembly of Silicon-Containing Block Copolymer Thin Films

Michael J. Maher, Charles Rettner, Christopher M. Bates, +7

ACS Applied Materials & Interfaces

EngineeringPolymer NanotechnologyMolecular Self-assemblyChemistryPolymers +16

Directed self-assembly defectivity assessment. Part II

Chris Bencher, He Yi, Jessica Zhou, +12

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

EngineeringMechanical EngineeringDefect ToleranceSocial SciencesSelf-assembly Defectivity Assessment +18