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Publications
21
Citations
1.4K
H-Index
17
Active since
1988
G. M. Wallraff is an author at IBM Research - Almaden specializing in engineering, chemistry, and materials science.
Publications per year
1988–2009
21
21
Thermal and acid-catalyzed deprotection kinetics in candidate deep ultraviolet resist materials
G. M. Wallraff, John M. Hutchinson, William D. Hinsberg et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 69 citations
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