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Publication | Open Access

Solution photochemistry of poly(dialkylsilanes): a new class of photoresists

DOIFull Paper Access

72

Citations

0

References

1988

Year

Josef Michl, J. W. Downing, Takashi Karatsu, Allan J. McKinley, Gabriella Poggi, G. M. Wallraff, Ratnam Sooriyakumaran, R. Miller
Pure and Applied Chemistry

Abstract

Abstract