Greg Breyta

Polymer self assembly in semiconductor microelectronics

Charles T. Black, Ricardo Ruiz, Greg Breyta et al. · IBM Journal of Research and Development · 2007 · 402 citations

Engineering, Molecular Self-assembly, Integrated Circuits +20

Experimental Implementation of an Adiabatic Quantum Optimization Algorithm

Matthias Steffen, Wim van Dam, Tad Hogg et al. · Physical Review Letters · 2003 · 177 citations · Full text

Experimental Implementation, Quantum Science, Engineering +14

Environmentally stable chemical amplification positive resist: principle, chemistry, contamination resistance, and lithographic feasibility.

Hiroshi Itô, Greg Breyta, Don Hofer et al. · Journal of Photopolymer Science and Technology · 1994 · 96 citations · Full text

Highly porous silicon membrane fabrication using polymer self-assembly

Charles T. Black, K.W. Guarini, Greg Breyta et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 50 citations

Materials Science, Membrane Structure, Membrane Formation +15

Development of 157 nm positive resists

Hiroshi Itô, G. M. Wallraff, Nicolette Fender et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 33 citations

Engineering, Organic Chemistry, Chemistry +24