Statistics
Publications
2
Citations
99
H-Index
2
Active since
2004
Affiliations
The University of Texas at Austin(Current)
E. K. Kim is an author at The University of Texas at Austin specializing in etching processes, step imprint lithography, and flash imprint lithography.
Publications per year
2004–2005
2
2
Effects of etch barrier densification on step and flash imprint lithography
Steve Johnson, Ryan L. Burns, E. K. Kim et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 38 citations
Natural Sciences, Materials Engineering, Materials Science +17
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