Nicholas A. Stacey

Imprint lithography for integrated circuit fabrication

Douglas J. Resnick, William J. Dauksher, David P. Mancini et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 120 citations

Engineering, Micromanufacturing, Integrated Circuits +20

Vinyl ethers in ultraviolet curable formulations for step and flash imprint lithography

E. K. Kim, Nicholas A. Stacey, Britain J. Smith et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 60 citations

Engineering, Electron-beam Lithography, Barrier Formulations +18

Development of imprint materials for the Step and Flash Imprint Lithography process

Frank Xu, Nicholas A. Stacey, M. Watts et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 30 citations

Mesoscale modeling for SFIL simulating polymerization kinetics and densification

Ryan L. Burns, Stephen C. Johnson, Gerard M. Schmid et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 29 citations

Advances in Step and Flash imprint lithography

Stephen C. Johnson, Todd Bailey, Michael D. Dickey et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 26 citations

Engineering, Electron-beam Lithography, Chemistry +18