Todd Bailey

Step and flash imprint lithography: a new approach to high-resolution patterning

Matthew Colburn, Stephen C. Johnson, M. D. Stewart et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 564 citations

Engineering, Materials Engineering, Materials Science +16

<title>Step and flash imprint lithography for sub-100-nm patterning</title>

Matthew Colburn, Annette Grot, Marie N. Amistoso et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 75 citations

Engineering, Materials Engineering, Materials Science +17

Characterization and modeling of volumetric and mechanical properties for step and flash imprint lithography photopolymers

Matthew Colburn, Itai Suez, Byung Jin Choi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 68 citations

Natural Sciences, Materials Engineering, Materials Science +17

Patterning nonflat substrates with a low pressure, room temperature, imprint lithography process

Matthew Colburn, Annette Grot, Byung Jin Choi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 60 citations

Engineering, Materials Engineering, Materials Science +11

High-resolution templates for step and flash imprint lithography

Douglas J. Resnick, William J. Dauksher, David P. Mancini et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 43 citations

Engineering, Materials Engineering, Materials Science +15