Valery V. Felmetsger

Temperature-compensated aluminum nitride lamb wave resonators

Chih‐Ming Lin, Ting-Ta Yen, Yun-Ju Lai et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2010 · 182 citations

Natural Sciences, Materials Engineering, Materials Science +16

Piezoelectric aluminum nitride nanoelectromechanical actuators

Nipun Sinha, Graham E. Wabiszewski, Rashed Mahameed et al. · Applied Physics Letters · 2009 · 167 citations · Full text

Engineering, Materials Engineering, Materials Science +17

AlN/3C–SiC Composite Plate Enabling High‐Frequency and High‐<i>Q</i> Micromechanical Resonators

Chih‐Ming Lin, Yung‐Yu Chen, Valery V. Felmetsger et al. · Advanced Materials · 2012 · 166 citations

Natural Sciences, Materials Engineering, Materials Science +13

Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications

Chih‐Ming Lin, Ting-Ta Yen, Valery V. Felmetsger et al. · Applied Physics Letters · 2010 · 129 citations

Natural Sciences, Materials Engineering, Materials Science +17

AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices

Chih‐Ming Lin, Wei-Cheng Lien, Valery V. Felmetsger et al. · Applied Physics Letters · 2010 · 78 citations

Natural Sciences, Materials Engineering, Materials Science +17